Numerical and Analytical Implementation of the Method for Calculating Optimal Modes of Laser Heat Treatment of Electronic Materials

Vollständiger Abstract

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A modification of the method of parametric optimization of non-stationary thermal conduction processes is proposed in relation to the problems of laser heat treatment of a wide class of materials used in electronic engineering, including semiconductors, dielectrics and superhard materials. Using the Matlab computer mathematics package, a computational algorithm has been developed for the automatic construction of the optimal heating mode according to the specified quality criterion, which makes it possible to significantly reduce the time for the experimental selection of processing parameters. The results of verification of the method are presented on the example of calculating the optimal modes of laser marking of electronic products, confirmed by comparison with known experimental data, which demonstrates the high accuracy of the proposed approach. Particular attention is paid to laser-induced graphitization of diamond, which makes it possible to form conductive structures in the volume of superhard materials, which opens up new prospects for the creation of functional elements of electronic technology based on diamond substrates.